生物纳米孔MEMS芯片测序电压信号

本数据采集于2019年12月至2014年12月。本研究利用半导体MEMS技术形成了有效单孔阵列超过100个检测单元的生物纳米孔测序芯片；并实现了电压信号采集下，对样品进行测序。通过分析电子显微镜测量分析，本研究中的纳米孔检测结构的深宽比达到了20:1，该深宽比优于常规半导体工艺所能达到的5:1。该研究记录了核酸序列过孔的电压信号，相对于纳米孔测序传统的电流信号，电压信号具有响应速度更快的能力。该研究中的芯片加工方法也形成了国内首个纳米孔测序量产芯片的工艺，使我国具有生物纳米孔测序芯片的加工能力。一方面为国家进入百亿级的纳米孔测序市场提供了支撑；另一方面为国家的基因安全提供了保证。This dataset was collected from December 2014 to December 2019. A biological nanopore sequencing chip with more than 100 detection units in its effective single-pore array was fabricated using semiconductor MEMS technology in this study, and sample sequencing was implemented under voltage signal acquisition. Through electron microscopy measurement and analysis, the aspect ratio of the nanopore detection structure in this study reached 20:1, which is superior to the 5:1 ratio achievable by conventional semiconductor processes. This study recorded voltage signals generated when nucleic acid sequences pass through the nanopores; compared with the traditional current signal employed in nanopore sequencing, the voltage signal exhibits a faster response speed. The chip fabrication method developed in this work also established the first domestic manufacturing process for mass-produced nanopore sequencing chips, endowing China with the manufacturing capability of biological nanopore sequencing chips. On one hand, this provides support for China's entry into the billion-level nanopore sequencing market; on the other hand, it safeguards the country's genetic security.

搜集汇总

背景与挑战

背景概述

该数据集记录了2019年12月至2014年12月期间，利用半导体MEMS技术开发的生物纳米孔测序芯片采集的电压信号。该芯片具有超过100个检测单元的单孔阵列，纳米孔结构深宽比达到20:1，优于常规工艺，电压信号相比传统电流信号响应更快。此技术实现了国内首个纳米孔测序量产芯片工艺，为国家进入纳米孔测序市场和保障基因安全提供了支撑。