电子束曝光系统循环扫描路径验证数据集

该数据集用于测试电子束曝光设备在循环扫描路径方式下的通用性能和灵活性，解决传统工艺中存在的图形兼容性差、参数耦合复杂等技术瓶颈。通过对多种dxf图形在不同曝光条件下的加工结果数据进行验证，企业可评估设备是否具备快速适应新工艺与多样结构的能力，进而降低工艺开发门槛，提升研发灵活性与设备投入产出比。数据成果对解决企业“设备适应性差、工艺移植难、研发周期长”等问题具有重要意义，在量子材料、微光子芯片、先进半导体器件制程等领域具备广泛应用前景。This dataset is used to test the general performance and flexibility of electron beam exposure equipment under the circular scanning path mode, addressing technical bottlenecks in traditional processes such as poor graphic compatibility and complex parameter coupling. By verifying the processing result data of various DXF graphics under different exposure conditions, enterprises can evaluate whether the equipment has the capability to rapidly adapt to new processes and diverse structures, thereby lowering the threshold for process development and improving R&D flexibility as well as the equipment's input-output ratio. The dataset outcomes are of great significance for solving enterprises' problems such as poor equipment adaptability, difficult process transplantation and long R&D cycles, and have broad application prospects in fields including quantum materials, micro-photonic chips, and advanced semiconductor device manufacturing processes.

搜集汇总

背景与挑战

背景概述

该数据集是电子束曝光系统在循环扫描路径工作模式下的实际加工记录，包含多种DXF图形文件的曝光参数（如步进、束流、剂量等），用于验证设备在微纳加工中的通用性和稳定性。数据集支持量子材料、微光子芯片等领域的快速工艺开发，解决图形兼容性差和研发周期长的问题。