基于超谐同步的高精度硅微加速度传感器测试数据

针对基于硅微谐振器的高性能微传感器自主创新中面临的基础科学问题和关键技术挑战，开展硅微谐振器的非线性效应及其影响规律基础研究，突破硅微谐振器结构优化设计，微结构制造精确工艺控制与低应力封装、微谐振高稳定性频率控制与电路系统集成，研制出自主可控的高性能加速度传感器。主要实验记录了零偏稳定性、噪声及标度因数稳定性等测试值，数据量为381KB.Aiming at the fundamental scientific issues and key technical challenges encountered in the independent innovation of high-performance microsensors based on silicon micro-resonators, this study conducts fundamental research on the nonlinear effects of silicon micro-resonators and their influencing laws, breaks through core technologies including optimal structural design of silicon micro-resonators, precise process control and low-stress packaging for microstructure manufacturing, high-stability frequency control for micro-resonance and circuit system integration, and develops independently controllable high-performance accelerometers. The main experiments record test metrics such as bias stability, noise and scale factor stability, with a total data volume of 381 KB.

搜集汇总

背景与挑战

背景概述

该数据集针对高性能硅微加速度传感器的自主创新，开展了硅微谐振器的非线性效应基础研究，并突破结构设计、制造工艺与系统集成等关键技术。它记录了加速度传感器的零偏稳定性、噪声及标度因数稳定性等测试数据，总数据量约为381KB。