Supplementary materials for: "Scanning Electron Microscopy-based Automatic Defect Inspection for Semiconductor Manufacturing: A Systematic Review"

This dataset contains supplementary materials for: "Scanning Electron Microscopy-based Automatic Defect Inspection for Semiconductor Manufacturing: A Systematic Review". More specifically, it provides (i) a document containing the full search commands used to identify records/papers, (ii) a spreadsheet of the screening results, (iii) a spreadsheet of the selected papers and their categorization results, and (iv) a BibTeX document with citations for the selected papers.