Data for: Chemical profiles of the oxides on tantalum in state of the art superconducting circuits

Experimental data and fitted parameter values presented in manuscript titled "Chemical profiles of the oxides on tantalum in state of the art superconducting circuits" by R. A. McLellan, A. Dutta, et al. Each csv file in the root folder contains fitted parameters or background correct data. Zip files contain raw data for both the sample being studied and reference samples of Au or Ag.本数据集涵盖R·A·麦克莱伦（R. A. McLellan）、A·杜塔（A. Dutta）等人发表于题为《当前最先进超导电路中钽氧化物的化学剖面》的学术论文中的实验数据与拟合参数值。根目录下的每个CSV（Comma-Separated Values）文件均存储拟合参数或经背景校正的数据；压缩包则包含待测样品以及金（Au）、银（Ag）参比样品的原始实验数据。