The AFM micrographs of vanadium oxide thin films obtained at 100°C

The DataSet contains the atomic force microscope images of the surface of vanadium oxide thin films. The thin films were obtained by the sol-gel method. The information about sol synthesis is described in the Journal of Nanomaterials. The sol was deposited on quartz glass and silicon substrate and vanadium thin films were obtained by annealing as-prepared films at 100°C under synthetic air. A Nanosurf Easyscan 2 AFM atomic force microscopy was used to examine the morphology of thin films.本数据集包含氧化钒薄膜表面的原子力显微镜（atomic force microscope, AFM）图像。该类薄膜通过溶胶-凝胶法制备而成，有关溶胶合成的详细信息已在《纳米材料期刊（Journal of Nanomaterials）》中予以阐述。实验中将溶胶沉积于石英玻璃与硅衬底之上，随后将制备得到的前驱薄膜在100℃的合成空气氛围下进行退火处理，最终得到钒薄膜。本研究采用Nanosurf Easyscan 2型原子力显微镜对薄膜的表面形貌进行表征。