Data to support the paper \\\"Investigating the thermal and irradiation stability of chemical vapor deposited erbium oxide tritium barrier coatings for Li breeder blanket applications\\\"

Data includes: Raw data files and final figure .tifs for Figures 1-4. Raw data for Figure 1 is SEM image files. Raw data for Figure 2 is experimentally measured XRD spectra saved as .csv files. Raw data for Figure 3 is the XRD peak list .csv files, .xlsx files used to create the Williamson-Hall plots and .xlsx file used to create the microstrain bar chart. Raw data for Figure 4 is TEM image files.