Nanopattern titanium/iron systems for anodization

SEM images of each step of the manufacturing process of titanium oxide/iron oxide heterojunction by a combined method of anodization and nanosphere lithography. The data set includes measurements of two series of the samples:series 1 - surface characterization of the nanopatterned Ti/TiO2/Fe system, where the top layer is 30 nm thick.series 2 - surface characterization of the nanopatterned Ti/TiO2/Fe system, where the top layer is 10 nm thick.The data in the series are divided into separate catalogs for samples prepared with different polystyrene nanospheres. The naming convention is as follows: Nanosphere diameter and plasma etching time.The measurements were carried out at different stages of manufacturing, which resulted in sub-catalogs such as:as-prepared - for the samples just after deposition of the metal layer through the mask of the nanospheres monolayer.after PS removing - nanospheres were removed and images show the array of metallic antidots.Anodized - samples were anodized, and titanium oxide nanotubes were formed.SEM measurements were performed at Vega Tescan 3 microscope in IFJ PAN in Krakow. Measured data are in .tif format and metadata concerning the measurements parameters are in .hdr format.The data were obtained as a result of Miniatura grant no. 2023/07/X/ST11/01451