Direct bonding and debonding of two-dimensional semiconductors

Name: Direct bonding and debonding of two-dimensional semiconductors
Creator: Zhang, Xingchao; Du, Luojun; Li, Yun; Xian, Lede; Lin, Shenghuang; Wang, Qinqin; Zhou, Lanying; Yang, Wei; Zhao, Jiaojiao; Bai, Xuedong; Yu, Hua; Dai, Liyan; Sun, Huacong; zhang, Guangyu; Wang, Shuopei; Wu, Fanfan; Tian, Jinpeng; Li, Na; Ji, Depeng; Zhu, Mingtong; Li, Jiawei; Wei, Zheng; Chen, Yutong; Li, Tong; Liu, Jieying; Zhang, Songge; Cao, Zexian; Li, Lu; Lu, Nianpeng; Shi, Dongxia
Published: 2025-10-01T00:00:00+08:00

Figshare2025-10-01 更新2026-04-08 收录

二维半导体

电子器件

数据链接：

https://figshare.com/articles/dataset/Direct_bonding_and_debonding_of_two-dimensional_semiconductors/30252058/1 数据链接链接失效反馈

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资源简介：

Raman spectra, XRD scan, SHG data of bonding-debonding bilayer 2D semiconductors, and electronic performance of FET devices based on monolayer MoS<sub>2</sub> directly bonded onto HfO<sub>2</sub> substrate.

提供机构：

Zhang, Xingchao; Du, Luojun; Li, Yun; Xian, Lede; Lin, Shenghuang; Wang, Qinqin; Zhou, Lanying; Yang, Wei; Zhao, Jiaojiao; Bai, Xuedong; Yu, Hua; Dai, Liyan; Sun, Huacong; zhang, Guangyu; Wang, Shuopei; Wu, Fanfan; Tian, Jinpeng; Li, Na; Ji, Depeng; Zhu, Mingtong; Li, Jiawei; Wei, Zheng; Chen, Yutong; Li, Tong; Liu, Jieying; Zhang, Songge; Cao, Zexian; Li, Lu; Lu, Nianpeng; Shi, Dongxia

创建时间：

2025-10-01