Supporting Information for Study on the optimization of the deposition rate of planetary GaN-MOCVD films based on CFD simulation and the corresponding surface model
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The Table S1 is about Eight sets of results based on RSM model predictions and CFD simulation; The Figures S1-S3 are about temperature profile with different regions and different speeds; The Figures S3-S15 are about mass fractions of Ga-containing with different regions and different speeds.
创建时间：
2018-01-16
