Supplemental Information for Epitaxial SiGeSn Grown on Si by Ion Implantation Manuscript - Contains additional data (including tables and figures) for our XPS, RBS, TEM/EDS, SE results.
SAXS Monomers Comparison, Tel22 (Na+) at C = 4.5 mM, PAGE, Estimate of the CD Com- ponent of the Dimeric Fraction, Summary of the Fitting Pa- rameters.
