NIST Electron Inelastic-Mean-Free-Path Database - SRD 71

The NIST Electron Inelastic-Mean-Free-Path Database provides values of electron inelastic mean free paths (IMFPs) principally for use in surface analysis by Auger-electron spectroscopy and X-ray photoelectron spectroscopy. The database includes IMFPs calculated from experimental optical data and IMFPs measured by elastic-peak electron spectroscopy. If no calculated or measured IMFPs are available for a material of interest, values can be estimated from the predictive IMFP formulae of Tanuma et al. and of Gries. IMFPs are available for electron energies between 50 eV and 10,000 eV although most of the available data are for energies less than 2,000 eV. A critical review of calculated and measured IMFPs has been published [C. J. Powell and A. Jablonski, J. Phys. Chem. Ref. Data 28, 19 (1999)].