Raw data of spectroscopic ellipsometry measurements (amplitude ratio (Ψ), phase change (Δ), complex refractive indices (ε1 and ε2), refractive index (n), extinction coefficient (k), and absorption coe
(a) Normalised transmission against electrical drive power for the three MZI with waveguide arm separations of 2um, 4um and 6um. (b) Electrical power required for switching (2π phase shift) for the 3
