HIM and AFM Data set from first AFM in the HIM test

In this work, the integration of an atomic force microscope (AFM) into a helium ion microscope<br> (HIM) is reported for the first time. The helium ion microscope is a powerful instrument, capable of sub-<br> nanometer resolution imaging and machining nanoscale structures, while the AFM is a well-established<br> versatile tool for multiparametric nanoscale metrology. Combining the two techniques opens the way for<br> unprecedented, in-situ, correlative analysis at the nanoscale. Nanomachining and analysis can be<br> performed without contamination of the sample as well as avoiding environmental changes between<br> processing steps. The practicality of the resulting tool lies in the complementarity of the two techniques as<br> the AFM offers not only true 3D topography maps---something the HIM can only provide in an indirect<br> way---but also allows for nanomechanical property mapping, as well as electrical and magnetic<br> characterisation of the sample after focused ion beam materials modification with the HIM. The<br> experimental setup is described and evaluated through a series of correlative experiments, demonstrating<br> the feasibility of the integration.