Plasma Sterilization data

This data is recorded at optimum conditions of discharge at reduced pressure using pulsed DC source. The Ocean spectrometer is used to record data coupled with capacitively coupled plasma chamber (CCP).本数据集采集于采用脉冲直流电源的减压最佳放电工况。实验中使用Ocean光谱仪（Ocean spectrometer）配合容性耦合等离子体腔（capacitively coupled plasma chamber, CCP）完成数据采集。