TEM data of (Cr,Fe,Mn,Co,Ni)3O4 High-entropy spinel oxide thin films deposited on amorphous SiO2 substrate by spray pyrolysis techniqe

This Dataset include presentation of summarized TEM investigation of (Mn,Co,Fe,Ni,Cr)3O4 high-entropy spinel oxide prepared in the form of a ~ 500 nm thin film utilising a facile spray pyrolysis technique. The structural and electrical properties of the layers were characterised after exposure to temperatures in the range of 400–900 ◦C. The as-deposited layers were amorphous, and crystallised upon heat treatment at 500 ◦C. Microstructural analyses proved a homogeneous elemental distribution and the desired Fd-3 m cubic spinel structure. Electrical conductivity measurements indicated a dependence on the processing temperature, with the highest electrical conductivity values (~3 S cm􀀀 1 at 700 ◦C) obtained for layers heat-treated at 700 ◦C. The spray pyrolysis technique seems to be well suited to fabricating and exploring spinel-based high-entropy oxides synthesized as thin films, and to studying new compositions containing transition metal cations.本数据集收录了通过简易喷雾热解法（spray pyrolysis technique）制备的约500 nm厚薄膜状(Mn,Co,Fe,Ni,Cr)₃O₄高熵尖晶石氧化物（high-entropy spinel oxide）的透射电子显微镜（Transmission Electron Microscopy, TEM）表征总结。该薄膜在400~900 ℃温度区间内经热处理后的结构与电学性能均得到了系统表征。初始沉积态的薄膜呈非晶结构，经500 ℃热处理后发生晶化。微观结构分析结果证实，薄膜元素分布均匀，且形成了目标Fd-3m立方尖晶石结构。电导率测试结果显示，薄膜电导率与热处理工艺温度呈显著依赖性，其中经700 ℃热处理的薄膜电导率最高，可达约3 S·cm⁻¹。综上，喷雾热解法非常适用于制备与研究薄膜型尖晶石基高熵氧化物，同时也可用于探究含过渡金属阳离子的新型高熵氧化物组分。